OVERVIEW
THE SCOPE AND TOPICS OF THE CONFERENCE

This conference will cover the following aspects:

  • ALD Precursors and Precursor Design

  • Simulation, Modeling, and Theory of ALD Growth

  • Surface Chemistry/Preparation for ALD

  • Patterned and Selective Area ALD

  • In-situ Monitoring and Analysis during ALD Growth

  • Plasma and Other Energy-Enhanced ALD Methods

  • Applications of ALD for Microelectronics

  • Energy Storage Applications of ALD

  • Applications of ALD for Photovoltaics

  • ALD Applications in Optics and Display

  • ALD for Flexible and Organic Electronics

  • ALD for Catalysis

  • ALD for Medical and Biological Applications

  • ALE Technology